Wafer center finding with kalman filter
A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder d...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
21.01.2014
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Subjects | |
Online Access | Get full text |
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Summary: | A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer. |
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Bibliography: | Application Number: US201213617333 |