Device and method for boron diffusion in semiconductors
A device and method for semiconductor fabrication includes forming a buffer layer on a semiconductor substrate and depositing an amorphous elemental layer on the buffer layer. Elements of the elemental layer are diffused through the buffer layer and into the semiconductor layer.
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
31.12.2013
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Subjects | |
Online Access | Get full text |
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