Porous and non-porous nanostructures

• Main Authors: FERRARI MAURO, CHIAPPINI CIRO, FAKHOURY JEAN RAYMOND, LIU XUEWU
• Format: Patent
• Language: English
• Published: 29.10.2013
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TRANSPORTING

Disclosed are a variety of porous and non-porous wire-like structures of microscopic and nanoscopic scale. For instance, disclosed are structures that comprise a porous object that comprises: (i) a first region; and (ii) a second region adjacent to the first region along an axis of the object, where the first region has at least one porous property different from that of the second region. Also disclosed are structures that include: (i) a high resistivity silicon; and (ii) a cross-section that is substantially perpendicular to an axis of the object. Also disclosed are methods of making and using such structures. For instance, the present invention provides methods of making a porous object by: (i) obtaining an etchable substrate; (ii) forming on a surface of the substrate a patterned porosification assisting metal layer that has at least one opening; and (iii) subsequently exposing the substrate to a first etching solution and a second etching solution to form respectively a first region and a second region of a porous object.