Method of fabricating metal oxide film on carbon nanotube and method of fabricating carbon nanotube transistor using the same

Provided is a method of forming a metal oxide film on a CNT and a method of fabricating a carbon nanotube transistor using the same. The method includes forming chemical functional group on a surface of the CNT and forming the metal oxide film on the CNT on which the chemical functional group is for...

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Bibliographic Details
Main Authors KIM UN-JEONG, LEE EUN-HONG, BAE EUN-JU, MIN YO-SEB
Format Patent
LanguageEnglish
Published 13.08.2013
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Summary:Provided is a method of forming a metal oxide film on a CNT and a method of fabricating a carbon nanotube transistor using the same. The method includes forming chemical functional group on a surface of the CNT and forming the metal oxide film on the CNT on which the chemical functional group is formed.
Bibliography:Application Number: US20080081454