Method of fabricating metal oxide film on carbon nanotube and method of fabricating carbon nanotube transistor using the same
Provided is a method of forming a metal oxide film on a CNT and a method of fabricating a carbon nanotube transistor using the same. The method includes forming chemical functional group on a surface of the CNT and forming the metal oxide film on the CNT on which the chemical functional group is for...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
13.08.2013
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Provided is a method of forming a metal oxide film on a CNT and a method of fabricating a carbon nanotube transistor using the same. The method includes forming chemical functional group on a surface of the CNT and forming the metal oxide film on the CNT on which the chemical functional group is formed. |
---|---|
Bibliography: | Application Number: US20080081454 |