Method for manufacturing an elastic body of Al2O3 ceramic, measuring membrane for a pressure sensor and pressure sensor with such a membrane

• Main Authors: LUDWIG HENRY, OBERBACH UTA, KASTNER FRANK, HEGNER FRANK, ROBETABERG ANDREAS
• Format: Patent
• Language: English
• Published: 16.07.2013
• Subjects: GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TESTING

A method for manufacturing an elastic deformation body made of an Al2O3 ceramic according to which a highly pure alumina having at most 2000 ppm MgO, at most 200 ppm inorganic impurities, a specific surface of at least 10 m2/g, an average grain size of at most 0.3 mum is applied. With the alumina and additives, there is produced via aqueous processing a homogeneous mixture, from which a pressable spray granulate is produced, which is formed by means of a uniaxial pressing method to a homogeneous, green body, which is subjected to a sinter process. The resulting elastic deformation body has a bending fracture stress sigmac, whose distribution F(sigmac) is given by the Weibull parameters sigma0>=800 MPa and m>=24, with an average grain size of the sintered material of no more than 2 mum, and wherein the sintered material of the deformation body has a density of not less than 3.98 g/cm3.