Parallellism conservation mechanism for nanopositioner

• Main Authors: RISTEA ALIN, DHESE KEITH
• Format: Patent
• Language: English
• Published: 16.07.2013
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GEARING; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERATION; HEATING; LIGHTING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MECHANICAL ENGINEERING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TESTING; THERMAL INSULATION IN GENERAL; TRANSPORTING; WEAPONS

A mechanical device for maintaining parallelism includes first, second, third and fourth bars. The first side surface of the first bar and the first side surface of the second bar are bridged by a first flexure, leaving a gap between the bottom surface of the first bar and the upper surface of the second bar; the second side surface of the second bar and the second side surface of the third bar are bridged by a second flexure, leaving a gap between the bottom surface of the second bar and the upper surface of the third bar; and the first side surface of the third bar and the first side surface of the fourth bar are bridged by a third flexure, leaving a gap between the bottom surface of the third bar and the upper surface of the fourth bar.