Defect review system and method, and program
A system is provided that realizes both reduction in coordinate error and improvement in throughput and allows observation of a micro-defect. The system includes: a function of measuring an amount of displacement between preliminarily calculated coordinates and an actual specimen position; a functio...
Saved in:
Main Authors | , , , , |
---|---|
Format | Patent |
Language | English |
Published |
18.06.2013
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | A system is provided that realizes both reduction in coordinate error and improvement in throughput and allows observation of a micro-defect. The system includes: a function of measuring an amount of displacement between preliminarily calculated coordinates and an actual specimen position; a function of optimizing a coordinate correction formula so as to minimize the amount of displacement from the measured amount of displacement; and a function of calculating variation of displacement between the preliminarily calculated coordinates and the actual specimen position by statistical processing. When a value of coordinate variation is sufficiently small with respect to the field of view of an image for observation, which is to be a defect observation image, the system acquires only the image for observation without performing acquisition of an image for search, which is to be a defect search image. |
---|---|
AbstractList | A system is provided that realizes both reduction in coordinate error and improvement in throughput and allows observation of a micro-defect. The system includes: a function of measuring an amount of displacement between preliminarily calculated coordinates and an actual specimen position; a function of optimizing a coordinate correction formula so as to minimize the amount of displacement from the measured amount of displacement; and a function of calculating variation of displacement between the preliminarily calculated coordinates and the actual specimen position by statistical processing. When a value of coordinate variation is sufficiently small with respect to the field of view of an image for observation, which is to be a defect observation image, the system acquires only the image for observation without performing acquisition of an image for search, which is to be a defect search image. |
Author | SUZUKI NAOMASA FUKUDA MUNEYUKI OBARA KENJI SHOJO TOMOYASU TAKAHASHI NORITSUGU |
Author_xml | – fullname: FUKUDA MUNEYUKI – fullname: OBARA KENJI – fullname: SHOJO TOMOYASU – fullname: SUZUKI NAOMASA – fullname: TAKAHASHI NORITSUGU |
BookMark | eNrjYmDJy89L5WTQcUlNS00uUShKLctMLVcoriwuSc1VSMxLUchNLcnIT9EBswuK8tOLEnN5GFjTEnOKU3mhNDeDgptriLOHbmpBfnxqcUFicmpeakl8aLCFiZm5qaWpk5ExEUoADqsrCA |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | US8467595B2 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US8467595B23 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 15:17:22 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US8467595B23 |
Notes | Application Number: US200913056353 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130618&DB=EPODOC&CC=US&NR=8467595B2 |
ParticipantIDs | epo_espacenet_US8467595B2 |
PublicationCentury | 2000 |
PublicationDate | 20130618 |
PublicationDateYYYYMMDD | 2013-06-18 |
PublicationDate_xml | – month: 06 year: 2013 text: 20130618 day: 18 |
PublicationDecade | 2010 |
PublicationYear | 2013 |
RelatedCompanies | SUZUKI NAOMASA FUKUDA MUNEYUKI OBARA KENJI SHOJO TOMOYASU HITACHI HIGH-TECHNOLOGIES CORPORATION TAKAHASHI NORITSUGU |
RelatedCompanies_xml | – name: SUZUKI NAOMASA – name: TAKAHASHI NORITSUGU – name: OBARA KENJI – name: FUKUDA MUNEYUKI – name: HITACHI HIGH-TECHNOLOGIES CORPORATION – name: SHOJO TOMOYASU |
Score | 2.901425 |
Snippet | A system is provided that realizes both reduction in coordinate error and improvement in throughput and allows observation of a micro-defect. The system... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | CALCULATING COMPUTING COUNTING HANDLING RECORD CARRIERS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS |
Title | Defect review system and method, and program |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130618&DB=EPODOC&locale=&CC=US&NR=8467595B2 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1La8MwDBale962bKPdCx9GTjUjWewshzDIizLog7UZvZXEcaGXtCwZ-_uTnbTbZbsZG4Rs-CTZlj4BPFicFY7gBc1twamTZ5xmGNVSyW0pXL5irqYUGo35MHVeF2zRgfWuFkbzhH5pckRElEC819peb38esSKdW1k95muc2rwkcz8y29sxGmSOcI4CP55OoklohqGfzszxm6_cLPNYgNb6QEXRimY_fg9UUcr2t0dJzuBwisLK-hw6sjTgJNw1XjPgeNT-dxtwpBM0RYWTLQirCxhEUuVgkKbqhDRczCQrC9K0gx7ocZt4dQkkiefhkKICy_1ml-lsr-rTFXTLTSl7QFbWCtGSeVJ9A3KnQJS5qqpfMLzaOtLrQ_9PMdf_rN3Aqd30d6DW8y10649PeYdets7v9fl8A204gLE |
link.rule.ids | 230,309,786,891,25594,76904 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT4NAEJ409VFvihrrcw-GU4mBwiIHYlIeQS20sWB6IzyWpBfaCMa_77DQ6kVvm9lks7vJN7OzM_MNwL1MtVzNaC6lSkYlNU2olOCrVmJUYZlOC03nlEJ-QL1IfVlqyx6strUwnCf0i5MjIqIyxHvN9fXm5xPL5rmV1UO6QtH6yQ1NW-y8Y1TIFOFsT0xnPrNnlmhZZrQQgzezMbOaoU1QW-_p6BE2NPvO-6QpStn8tijuMezPcbGyPoEeKwUYWNvGawIc-l28W4ADnqCZVSjsQFidwshmTQ4GaatOSMvFTJIyJ2076BEfd4lXZ0BcJ7Q8CTcQ7w4bR4vdVsfn0C_XJbsAUsgFoiUxWBMGpGqOKNObqv5MQ9dWZcYQhn8uc_nP3B0MvNCfxtPn4PUKjpS214MkP15Dv_74ZDdocev0lt_VN5exg5w |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Defect+review+system+and+method%2C+and+program&rft.inventor=FUKUDA+MUNEYUKI&rft.inventor=OBARA+KENJI&rft.inventor=SHOJO+TOMOYASU&rft.inventor=SUZUKI+NAOMASA&rft.inventor=TAKAHASHI+NORITSUGU&rft.date=2013-06-18&rft.externalDBID=B2&rft.externalDocID=US8467595B2 |