Auto-sequencing multi-directional inline processing apparatus

An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike...

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Bibliographic Details
Main Authors KLEINKE STEVE, TOSHIMA MASATO, BLONIGAN WENDELL THOMAS, LAW KAM S, STEVENS CRAIG LYLE, BERKSTRESSER DAVID ERIC
Format Patent
LanguageEnglish
Published 21.05.2013
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Summary:An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.
Bibliography:Application Number: US20100965798