Semiconductor light-emitting element, fabrication method thereof, convex part formed on backing, and convex part formation method for backing

• Main Authors: NARUI HIRONOBU, YASHIMA KIYOTAKA, KARINO SACHIO, KIWAKI YOSHINARI, MICHIRU KAMADA, OKANO NOBUKATA
• Format: Patent
• Language: English
• Published: 02.04.2013
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A convex part formation method of forming a convex part in parallel with a direction of a backing on the backing having a {100} face as the top surface thereof, includes: (a) forming a mask layer in parallel with the direction on the backing; (b) etch the backing so as to form a convex-part upper layer whose sectional shape on a cutting plane corresponding to a {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of U; and (c) further etching the backing so as to form a convex-part lower layer whose sectional shape on the cutting plane corresponding to the {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of D (where D≠ U).