Rotation rate sensor having a quadrature compensation pattern
A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode. The second electrode has a first electrode surface and a second electrode surface which are situated opposite to each other. The first electrode is situat...
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Main Author | |
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Format | Patent |
Language | English |
Published |
19.02.2013
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Subjects | |
Online Access | Get full text |
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Summary: | A rotation-rate sensor having at least one quadrature compensation pattern, which includes at least one first electrode and one second electrode. The second electrode has a first electrode surface and a second electrode surface which are situated opposite to each other. The first electrode is situated in an intermediate space, between the first electrode surface and the second electrode surface. The first electrode surface and also the second electrode surface, over their extension, are at a different distance from the first electrode. The first electrode surface and the second electrode surface of the second electrode are at generally the same distance from each other, over their extension. |
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Bibliography: | Application Number: US20070308533 |