Semiconductor capacitor

A semiconductor capacitor and its method of fabrication are disclosed. A non-linear nitride layer is used to increase the surface area of a capacitor plate, resulting in increased capacitance without increase in chip area used for the capacitor.

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Bibliographic Details
Main Authors HORAK DAVID VACLAV, SHOBHA HOSADURGA, PONOTH SHOM, YANG CHIHAO
Format Patent
LanguageEnglish
Published 15.01.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A semiconductor capacitor and its method of fabrication are disclosed. A non-linear nitride layer is used to increase the surface area of a capacitor plate, resulting in increased capacitance without increase in chip area used for the capacitor.
Bibliography:Application Number: US201113165191