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A susceptor includes a flexible substrate and a metallic material provided on at least one surface of the substrate. A first plurality of ventilation apertures are formed in the substrate and the metallic material, and the first plurality of ventilation apertures are configured to permit a fluid to...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
25.12.2012
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Subjects | |
Online Access | Get full text |
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Summary: | A susceptor includes a flexible substrate and a metallic material provided on at least one surface of the substrate. A first plurality of ventilation apertures are formed in the substrate and the metallic material, and the first plurality of ventilation apertures are configured to permit a fluid to pass through the substrate and the metallic material. |
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Bibliography: | Application Number: US20080197805 |