Low thermal mass semiconductor wafer plate

A support for a semiconductor wafer includes a plate having a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality of holes extends from the recessed surface, and the support surface is free of holes to inhibit contami...

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Bibliographic Details
Main Authors HELLWIG LANCE G, GILMORE BRIAN LAWRENCE
Format Patent
LanguageEnglish
Published 17.07.2012
Subjects
COFFEE MILLS
DOMESTIC ARTICLES OR APPLIANCES
FURNITURE
HOUSEHOLD OR TABLE EQUIPMENT
HUMAN NECESSITIES
SPICE MILLS
SUCTION CLEANERS IN GENERAL
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Summary:A support for a semiconductor wafer includes a plate having a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality of holes extends from the recessed surface, and the support surface is free of holes to inhibit contamination of the wafer.
Bibliography:Application Number: US201113232676