Nonvolatile semiconductor memory device and method for driving same

• Main Authors: OOTA SHIGETO, TANAKA HIROYASU, FUJIWARA TOMOKO, KITO MASARU, FUKUZUMI YOSHIAKI, MATSUNAMI JUNYA, KIRISAWA RYOUHEI, KIDOH MASARU, KATSUMATA RYOTA, MIKAJIRI YOSHIMASA, ISHIDUKI MEGUMI, AOCHI HIDEAKI, KOMORI YOSUKE
• Format: Patent
• Language: English
• Published: 29.05.2012
• Subjects: ELECTRICITY; INFORMATION STORAGE; PHYSICS; STATIC STORES

According to one embodiment, a nonvolatile semiconductor memory device includes a memory cell array and a control circuit. The memory cell array includes a stacked body, a through-hole, a semiconductor pillar, and a charge storage film. The stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films. The through-hole is made in the stacked body to align in a stacking direction. The semiconductor pillar is buried in the through-hole. The charge storage film is provided between the electrode films and the semiconductor pillar. Memory cells are formed at each intersection between the electrode films and the semiconductor pillar. The control circuit writs a first value to at least some of the memory cells, performs an erasing operation of the first value from the memory cell written with the first value, reads data stored in the memory cell having undergone the erasing operation, and sets the memory cell to be unusable in a case that the first value is read from the memory cell.