Electronic device including a conductive structure extending through a buried insulating layer
An electronic device can include a substrate, a buried insulating layer overlying the substrate, and a semiconductor layer overlying the buried insulating layer, wherein the semiconductor layer is substantially monocrystalline. The electronic device can also include a conductive structure extending...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
29.05.2012
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Subjects | |
Online Access | Get full text |
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Summary: | An electronic device can include a substrate, a buried insulating layer overlying the substrate, and a semiconductor layer overlying the buried insulating layer, wherein the semiconductor layer is substantially monocrystalline. The electronic device can also include a conductive structure extending through the semiconductor layer and buried insulating layer and abutting the substrate, and an insulating spacer lying between the conductive structure and each of the semiconductor layer and the buried insulating layer. |
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Bibliography: | Application Number: US20060556576 |