Vibration-insensitive interferometer using high-speed camera and continuous phase scanning method

• Main Authors: PARK JUNG-JAE, KIM SEUNG-WOO
• Format: Patent
• Language: English
• Published: 27.03.2012
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The present invention relates to a vibration-insensitive interferometer using a high-speed camera and a continuous phase scanning method. The interferometer measures a measurement target by completely isolating influences of externally occurring vibrations from a frequency domain. The interferometer includes a light source unit for emitting light. A light transmission unit radiates the light emitted from the light source unit to the measurement target, splits light reflected from the measurement target into reference light and measurement light, and allows the reference light and the measurement light to interfere with each other, thus generating an interference fringe. A continuous phase scanning unit for radiates the reference light split by the light transmission unit through continuous phase scanning. A high-speed camera acquires an interference fringe generated by both the measurement light radiated through the light transmission unit and the reference light radiated through the continuous phase scanning unit.