Turbo vacuum pump and semiconductor manufacturing apparatus having the same

A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor bla...

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Bibliographic Details
Main Authors KAWASHIMA HIROYASU, OGAMINO HIROAKI, SEKIGUCHI SHINICHI
Format Patent
LanguageEnglish
Published 29.11.2011
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
Bibliography:Application Number: US20090613854