Liquid discharge head, liquid supply cartridge, and liquid jet apparatus having electrostatic actuator formed by a semiconductor manufacturing process

An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and les...

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Main Authors KURODA TAKAHIKO, TANAKA MAKOTO, IRINODA MITSUGU, HASHIMOTO KENICHIROH, NISHIMURA MANABU, ABE SHUYA
Format Patent
LanguageEnglish
Published 08.11.2011
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Summary:An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and less variation in characteristics.
Bibliography:Application Number: US20080174342