Cylindrical coil and cylindrical micromotor using the same

A high-precision cylindrical coil having a high-precision fine coil pattern and a high mechanical precision such as fine roundness and no axial runout, and a cylindrical micrometer using the cylindrical coil are provided. In a cylindrical coil, a plurality of layers of coil patterns formed by fillin...

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Bibliographic Details
Main Authors HIYAMA YOSHIHITO, IMAIZUMI NOBUO, NAKAMURA KAZUYA
Format Patent
LanguageEnglish
Published 26.07.2011
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Summary:A high-precision cylindrical coil having a high-precision fine coil pattern and a high mechanical precision such as fine roundness and no axial runout, and a cylindrical micrometer using the cylindrical coil are provided. In a cylindrical coil, a plurality of layers of coil patterns formed by filling the coil pattern grooves formed on a cylindrical substrate with a conductor and a plurality of insulating layers coating the cylindrical substrate are formed, the layers of coil patterns are electrically interconnected to each other by filling a through-hole formed by performing a hole forming process with a conductor, and the outmost layer is made of an insulating material.
Bibliography:Application Number: US20060913794