Method for manufacturing nonvolatile storage element and method for manufacturing nonvolatile storage device

• Main Authors: TAKAGI TAKESHI, MIKAWA TAKUMI, ARITA KOJI, KAWASHIMA YOSHIO
• Format: Patent
• Language: English
• Published: 19.07.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method for manufacturing a nonvolatile storage element that minimizes shape shift between an upper electrode and a lower electrode, and which includes: depositing, in sequence, a connecting electrode layer which is conductive, a lower electrode layer and a variable resistance layer which are made...