Plasma resistant seal

To make a plasma resistant seal excellent in both a plasma resisting performance and a sealing performance, and prevent an O-ring from protruding to a vacuum side gap, a plasma seal (6) made of PTFE having a plasma resisting performance is provided in a plasma irradiating side of an O-ring (5) as a...

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Bibliographic Details
Main Author SHOJIMA DAIHACHI
Format Patent
LanguageEnglish
Published 17.05.2011
Subjects
ADHESIVES
BASIC ELECTRIC ELEMENTS
BLASTING
CHEMISTRY
CYLINDERS
DYES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
MECHANICAL ENGINEERING
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
PAINTS
PISTONS
POLISHES
SEALINGS
SEMICONDUCTOR DEVICES
THERMAL INSULATION IN GENERAL
WEAPONS
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Summary:To make a plasma resistant seal excellent in both a plasma resisting performance and a sealing performance, and prevent an O-ring from protruding to a vacuum side gap, a plasma seal (6) made of PTFE having a plasma resisting performance is provided in a plasma irradiating side of an O-ring (5) as a main seal made of a rubber-like elastic material, an installation groove (4) shallower than a depth of an installation groove (3) provided in an installation member (2) is continuously provided in a plasma irradiation side of the installation groove (3), the O-ring (5) is attached to the installation groove (3), and the plasma seal (6) is attached to the installation groove (4) in a compressed state, or the O-ring is attached to the installation groove and the plasma seal is attached to the plasma irradiation side of the same installation groove (3) in a compressed state.
Bibliography:Application Number: US20050529261