Method and system for detecting tool errors to stop a process recipe for a single chamber

A method for detecting tool errors to stop a process recipe for a single chamber is disclosed. When a recipe error for one of chamber of a process tool is detected, only the chamber with the recipe error is terminated and other chambers are allowed to proceed with their recipe processes for preventi...

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Bibliographic Details
Main Authors CHEN CHUN-HSIANG, LAI YUN-SEN, HO KENG-HSIEN, KUO HUNGIH, TSENG CHIEN-LUNG
Format Patent
LanguageEnglish
Published 15.03.2011
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:A method for detecting tool errors to stop a process recipe for a single chamber is disclosed. When a recipe error for one of chamber of a process tool is detected, only the chamber with the recipe error is terminated and other chambers are allowed to proceed with their recipe processes for preventing excursions.
Bibliography:Application Number: US20080166245