Strain sensor and method for manufacture thereof

The invention presents a strain sensor includes a substrate, a crystallized glass laminated on the substrate, a strain sensitive resistor laminated on the crystallized glass, in which the crystallized glass is formed by baking a plurality of types of crystallized glass powder having different thermo...

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Bibliographic Details
Main Authors NAKAO KEIICHI, ABURATA KOICHI, MIZUKAMI YUKIO, ISHIDA HIROAKI
Format Patent
LanguageEnglish
Published 08.02.2011
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Summary:The invention presents a strain sensor includes a substrate, a crystallized glass laminated on the substrate, a strain sensitive resistor laminated on the crystallized glass, in which the crystallized glass is formed by baking a plurality of types of crystallized glass powder having different thermomechanical constants. As a result, the fluctuation of sensor characteristic is decreased, and the cost is lowered.
Bibliography:Application Number: US20050667968