Strain sensor and method for manufacture thereof
The invention presents a strain sensor includes a substrate, a crystallized glass laminated on the substrate, a strain sensitive resistor laminated on the crystallized glass, in which the crystallized glass is formed by baking a plurality of types of crystallized glass powder having different thermo...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
08.02.2011
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Subjects | |
Online Access | Get full text |
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Summary: | The invention presents a strain sensor includes a substrate, a crystallized glass laminated on the substrate, a strain sensitive resistor laminated on the crystallized glass, in which the crystallized glass is formed by baking a plurality of types of crystallized glass powder having different thermomechanical constants. As a result, the fluctuation of sensor characteristic is decreased, and the cost is lowered. |
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Bibliography: | Application Number: US20050667968 |