Wafer center finding with charge-coupled devices

A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior of the robot chamber, the linear array positioned to acquire image data from a measurement volume in one...

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Bibliographic Details
Main Author FOGEL PAUL E
Format Patent
LanguageEnglish
Published 28.12.2010
Subjects
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
TESTING
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Summary:A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior of the robot chamber, the linear array positioned to acquire image data from a measurement volume in one or more predetermined locations within the robot chamber.
Bibliography:Application Number: US20080032489