Edge termination for semiconductor device
A semiconductor device has active region (30) and edge termination region (32) which includes a plurality of floating field regions (46). Field plates (54) extend in the edge termination region (32) inwards from contact holes (56) towards the active region (30) over a plurality of floating field reg...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English |
Published |
28.12.2010
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A semiconductor device has active region (30) and edge termination region (32) which includes a plurality of floating field regions (46). Field plates (54) extend in the edge termination region (32) inwards from contact holes (56) towards the active region (30) over a plurality of floating field regions (46). Pillars (40) may be provided. |
---|---|
Bibliography: | Application Number: US20060914648 |