Compensation value setting device and compensation value setting method
A compensation value setting device selects, based on the first and second index values calculated by the first and second index value calculation sections for each combination of the spherical aberration compensation value and the lens' position compensation value, one combination of the spher...
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Main Author | |
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Format | Patent |
Language | English |
Published |
14.12.2010
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Subjects | |
Online Access | Get full text |
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Summary: | A compensation value setting device selects, based on the first and second index values calculated by the first and second index value calculation sections for each combination of the spherical aberration compensation value and the lens' position compensation value, one combination of the spherical aberration compensation value and the lens' position compensation value and then sets the selected combination for correcting the spherical aberration and the position of the objective lens. |
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Bibliography: | Application Number: US20080126638 |