Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus

An optical system includes a fluoride compound and has surfaces facing and exposed to plasma installed in an optical equipment which has an inner zone where the plasma exists. A 2 nm-20 nm protective film of a highly plasma-resistant material is formed on the surface of the fluoride compound that is...

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Bibliographic Details
Main Authors YAMAZAKI NORIKO, FUTAMI HIROSHI, KURIBAYASHI SHIZUMA, TSURUGA SHIGENORI, YAMAKOSHI HIDEO, SAKAI SATOSHI, DANNO MINORU
Format Patent
LanguageEnglish
Published 12.10.2010
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
CLEANING
CLEANING IN GENERAL
COMPUTING
COUNTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING RECORD CARRIERS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
PRESENTATION OF DATA
PREVENTION OF FOULING IN GENERAL
RECOGNITION OF DATA
RECORD CARRIERS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:An optical system includes a fluoride compound and has surfaces facing and exposed to plasma installed in an optical equipment which has an inner zone where the plasma exists. A 2 nm-20 nm protective film of a highly plasma-resistant material is formed on the surface of the fluoride compound that is exposed to the plasma.
Bibliography:Application Number: US20070682776