Mold, pattern forming method, and pattern forming apparatus
A mold applicable to imprinting includes a first surface having an area of a pattern to be transferred, a second surface located opposite from the first surface, a first mark for alignment provided at the first surface, and a second mark for alignment provided at a position at which the second mark...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
14.09.2010
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Subjects | |
Online Access | Get full text |
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Summary: | A mold applicable to imprinting includes a first surface having an area of a pattern to be transferred, a second surface located opposite from the first surface, a first mark for alignment provided at the first surface, and a second mark for alignment provided at a position at which the second mark is spaced from the first surface. |
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Bibliography: | Application Number: US20060448009 |