Integrated circuit testing with laser stimulation and emission analysis

A diagnostic tool for testing an integrated circuit device directs a beam of laser energy to stimulate at least a portion of the device. In one mode, electromagnetic waves from said device may be detected at the same time in response to the stimulation. A processor collects image data and determines...

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Bibliographic Details
Main Authors CHEN YUANUAN STEVEN, BOCKELMAN DANIEL RICHARD, BROOKRESON CHRISTOPHER JOHN, RAHMAN MD ASIFUR
Format Patent
LanguageEnglish
Published 17.08.2010
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A diagnostic tool for testing an integrated circuit device directs a beam of laser energy to stimulate at least a portion of the device. In one mode, electromagnetic waves from said device may be detected at the same time in response to the stimulation. A processor collects image data and determines as a function of the collected image data whether the device has a defect. Other embodiments are described and claimed.
Bibliography:Application Number: US20070691480