Sensor element assembly and method
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptica...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
17.08.2010
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Subjects | |
Online Access | Get full text |
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Summary: | Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity. |
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Bibliography: | Application Number: US20080109275 |