Method of forming semiconductor package

A method of forming a semiconductor package (10) including forming a plurality of cavities (14) in a substrate (12). An electrically conductive pattern (16) is formed on the substrate (12) and over the cavities (14). An electrically insulating layer (22) is formed over the substrate (12) and the ele...

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Bibliographic Details
Main Author LO WAI YEW
Format Patent
LanguageEnglish
Published 29.06.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A method of forming a semiconductor package (10) including forming a plurality of cavities (14) in a substrate (12). An electrically conductive pattern (16) is formed on the substrate (12) and over the cavities (14). An electrically insulating layer (22) is formed over the substrate (12) and the electrically conductive pattern (16). A plurality of vias (24) is formed in the electrically insulating layer (22). An integrated circuit (IC) die (28) is attached to the electrically insulating layer (22) and electrically connected to the vias (24) such that the IC die (28) is connected to the electrically conductive pattern (16). A molding operation is performed to encapsulate the IC die (28). The substrate (12) is removed such that the electrically conductive pattern (16) is exposed.
Bibliography:Application Number: US20080234709