Bond pad design to minimize dielectric cracking

An improved via arrangement for a bonding pad structure is disclosed comprising an array of vias surrounded by a line via. The line via provides a barrier to cracks in the dielectric layer encompassing the via array. Although cracks are able to spread relatively unhindered between the vias of the vi...

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Bibliographic Details
Main Authors LIU I-TAI, LIN LIANGN, TSAO PEI-HAW, KIANG BILL, NIU PAO-KANG
Format Patent
LanguageEnglish
Published 16.03.2010
Subjects
BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
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Summary:An improved via arrangement for a bonding pad structure is disclosed comprising an array of vias surrounded by a line via. The line via provides a barrier to cracks in the dielectric layer encompassing the via array. Although cracks are able to spread relatively unhindered between the vias of the via array, they are blocked by the line via and thus can not spread to neighboring regions of the chip or wafer. The line via can be provided in a variety of shapes and dimensions, to suit a desired application. Additionally, due to its substantially uninterrupted length, the line via provides added strength to the bond pad.
Bibliography:Application Number: US20060557372