Lithographic apparatus and control method
A lithographic apparatus includes a movable part and a controller to control a position quantity of the movable part. The controller includes a first controller transfer function and a second controller transfer function. A selector selects the first controller transfer function or the second contro...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
02.02.2010
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Subjects | |
Online Access | Get full text |
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Summary: | A lithographic apparatus includes a movable part and a controller to control a position quantity of the movable part. The controller includes a first controller transfer function and a second controller transfer function. A selector selects the first controller transfer function or the second controller transfer function depending on a state of the movable part. The first controller transfer function may be chosen in a substantially stationary state of the movable part, while in a substantially non-stationary state of the movable part, the second controller transfer function may be chosen. |
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Bibliography: | Application Number: US20050227445 |