Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby

A multi-layered spectral purity filter improves the spectral purity of extreme ultra-violet (EUV) radiation and also collects debris emitted from a radiation source.

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Bibliographic Details
Main Authors BANINE VADIM YEVGENYEVICH, SALASHCHENKO NIKOLAY NIKOLAEVITCH, SHMAENOK LEONID, MOORS JOHANNES HUBERTUS JOSEPHINA
Format Patent
LanguageEnglish
Published 29.12.2009
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:A multi-layered spectral purity filter improves the spectral purity of extreme ultra-violet (EUV) radiation and also collects debris emitted from a radiation source.
Bibliography:Application Number: US20080073128