Lithographic apparatus

The invention provides a height detecting apparatus for a lithographic apparatus. The height mapping apparatus includes a height mapping unit for providing at least one height map of a top surface of an object to be placed in a radiation beam of the lithographic apparatus, the object to be clamped b...

Full description

Saved in:
Bibliographic Details
Main Authors OTTENS JOOST JEROEN, VAN MEER ASCHWIN LODEWIJK HENDRICUS JOHANNES, VINK JACOB WILLEM, COMPEN RENE THEODORUS PETRUS, TEL WIM TJIBBO, GERRITS PETRUS JOHANNES
Format Patent
LanguageEnglish
Published 29.12.2009
Subjects
ACCESSORIES THEREFOR
APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
PHOTOGRAPHY
PHYSICS
Online AccessGet full text

Cover

More Information
Summary:The invention provides a height detecting apparatus for a lithographic apparatus. The height mapping apparatus includes a height mapping unit for providing at least one height map of a top surface of an object to be placed in a radiation beam of the lithographic apparatus, the object to be clamped by a clamping force applied thereto on a support constructed to support the object. The height mapping apparatus also includes a control unit for controlling the mapping unit to provide the at least one height map of the object relative to at least two different clamping pressure levels.
Bibliography:Application Number: US20050252230