Piezoelectric actuator and method of fabricating piezoelectric actuator

A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate in the form of a pattern on the surface of the substrate, a film-deposition permitting region A to whi...

Full description

Saved in:
Bibliographic Details
Main Authors KOBAYASHI KAZUO, YASUI MOTOHIRO, BABA SOU, AKEDO JUN, SUGAHARA HIROTO
Format Patent
LanguageEnglish
Published 28.07.2009
Subjects
CORRECTION OF TYPOGRAPHICAL ERRORS
ELECTRICITY
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
Online AccessGet full text

Cover

More Information
Summary:A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate in the form of a pattern on the surface of the substrate, a film-deposition permitting region A to which particles of a piezoelectric material in a carrier gas adhere in a form of a film and a film-deposition inhibiting region B which inhibits the formation of a film are provided. Further, when a carrier gas containing particles of a piezoelectric material are ejected onto the surface of the substrate by means of AD, a film-like piezoelectric material layer is formed as a result of the adhesion of the particles in the film-deposition permitting region A. As a result, the piezoelectric material layer can be formed easily in a partial region of the surface of the substrate.
Bibliography:Application Number: US20050083953