Lithographic apparatus and method for manufacturing a device

• Main Authors: LEVASIER LEON MARTIN, LOOPSTRA ERIK ROELOF, SENGERS TIMOTHEUS FRANCISCUS, BECKERS MARCEL, VAN EMPEL TJARKO ADRIAAN RUDOLF, VAN DEN SCHOOR LEON JOSEPH MARIE, VAN ASTEN NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, BOX WILHELMUS JOSEPHUS, VAN LOENHOUT ELKE, MUITJENS MARCEL JOHANNUS ELISABETH HUBERTUS, OUWEHAND LUBERTHUS, JANSEN ROB
• Format: Patent
• Language: English
• Published: 02.06.2009
• Subjects: ACCESSORIES THEREFOR; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES; APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; PHOTOGRAPHY; PHYSICS

A lithographic apparatus is disclosed. The apparatus includes a substrate table constructed to hold a substrate. The substrate table is moveable to transfer the substrate between a substrate measuring position and a substrate processing position. The apparatus also includes a measuring system config...