Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
The present invention is related to a method for manufacturing micro-electro-mechanical systems (MEMS) having movable and stationary suspended structures formed from mono-crystalline silicon wafer or chip, bonded to a substrate wafer with an polymer adhesive layer that serves as spacer and as a sacr...
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Main Author | |
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Format | Patent |
Language | English |
Published |
02.06.2009
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Subjects | |
Online Access | Get full text |
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