Interconnect structure and fabricating method thereof
An interconnect structure is described, disposed on a substrate with a conductive part thereon and including a first porous low-k layer on the substrate, a damascene structure in the first porous low-k layer electrically connecting with the conductive part, a second porous low-k layer over the first...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
07.04.2009
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Subjects | |
Online Access | Get full text |
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Summary: | An interconnect structure is described, disposed on a substrate with a conductive part thereon and including a first porous low-k layer on the substrate, a damascene structure in the first porous low-k layer electrically connecting with the conductive part, a second porous low-k layer over the first porous low-k layer and the damascene structure, and a UV cutting layer at least between the first and the second porous low-k layers, wherein the UV cutting layer is a UV reflection layer or a UV reflection-absorption layer. |
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Bibliography: | Application Number: US20060307161 |