Apparatus for reduction of defects in wet processed layers
The present invention provides an apparatus for wet processing of a conductive layer using a degassed process solution such as a degassed electrochemical deposition solution, a degassed electrochemical polishing solution, a degassed deposition solution, and a degassed cleaning solution. The techniqu...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
17.03.2009
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention provides an apparatus for wet processing of a conductive layer using a degassed process solution such as a degassed electrochemical deposition solution, a degassed electrochemical polishing solution, a degassed deposition solution, and a degassed cleaning solution. The technique includes degassing the process solution before delivering the degassed process solution to a processing unit or degassing the process solution in situ, within the processing unit. |
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Bibliography: | Application Number: US20070704631 |