Method for removing organic electroluminescent residues from a substrate

A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote...

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Bibliographic Details
Main Authors PLISHKA MARTIN JAY, MAROULIS PETER JAMES, ROGERS STEVEN ARTHUR, DICKENSON JOHN BARTRAM, SISTERN MARK IAN, JOHNSON ANDREW DAVID
Format Patent
LanguageEnglish
Published 03.02.2009
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.
Bibliography:Application Number: US20060518958