Method for manufacturing micro lenses including underlayer film and lens film etching steps

A solid-state imager is disclosed wherein isolation regions (4) are covered with power supply lines (8), a light-transmitting lens film (24) whose surface forms continuous convex portions above the isolation regions (4) convex towards channel regions (5) is provided, and a light-transmitting materia...

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Bibliographic Details
Main Authors MATSUI RYOUJI, TAKEGAWA KAZUYUKI, KAI SEIJI, YAMADA TETSUYA, IMAI TSUTOMU
Format Patent
LanguageEnglish
Published 02.12.2008
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Summary:A solid-state imager is disclosed wherein isolation regions (4) are covered with power supply lines (8), a light-transmitting lens film (24) whose surface forms continuous convex portions above the isolation regions (4) convex towards channel regions (5) is provided, and a light-transmitting material having a refractive index lower than that of the lens film (24) is provided over the lens film (24).
Bibliography:Application Number: US20050533030