Micromachined device utilizing electrostatic comb drives to filter mechanical vibrations

A micromachined device for filtering mechanical vibrations caused by an external disturbance is disclosed. The device can include a first electrostatic vertical comb drive assembly having a first array of stationary elements and a second array of movable elements correspondingly interspersed with th...

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Bibliographic Details
Main Authors FLOWERS GEORGE TIMOTHY, DEAN, JR. ROBERT NEAL
Format Patent
LanguageEnglish
Published 08.04.2008
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Summary:A micromachined device for filtering mechanical vibrations caused by an external disturbance is disclosed. The device can include a first electrostatic vertical comb drive assembly having a first array of stationary elements and a second array of movable elements correspondingly interspersed with the first array. The device can also include a plurality of springs, each springs coupled between a support frame and a proof mass. The first drive assembly can be configured for motion in the z-direction. The device can include a sensor for sensing a position of the proof mass relative to the support frame by measuring displacement between each of the stationary and movable elements. The device can further include a second electrostatic vertical comb drive assembly. The device can have multiple electrostatic comb drive assemblies. An optional feedback network signal processes a displacement measurement to control one of the drive assemblies.
Bibliography:Application Number: US20050149922