Nanoscale displacement detector

A nanoscale displacement detector includes a cantilever integrated with an optical resonator, referred to herein as a "microresonator." The microresonator and cantilever are configured such that displacement of the cantilever relative to the microresonator causes a change in the resonant f...

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Bibliographic Details
Main Author TABER ROBERT C
Format Patent
LanguageEnglish
Published 25.03.2008
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:A nanoscale displacement detector includes a cantilever integrated with an optical resonator, referred to herein as a "microresonator." The microresonator and cantilever are configured such that displacement of the cantilever relative to the microresonator causes a change in the resonant frequency of the microresonator. The change in the resonant frequency of the microresonator is used to monitor cantilever displacement. In an embodiment, the microresonator includes a cavity that faces the cantilever and the cantilever includes a protrusion that faces the microresonator and is aligned with the cavity.
Bibliography:Application Number: US20050280365