Electromagnetic scanning micro-mirror and optical scanning device using the same

An electromagnetic scanning micro-mirror is provided with a magnetic field generator for supplying a magnetic field, a mirror plate having a reflective plane and a frame structure attached to a rear surface of the reflective plane, a substrate to surround the mirror plate, a pair of torsion bars to...

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Bibliographic Details
Main Authors YEE YOUNG-JOO, JI CHANG-HYEON
Format Patent
LanguageEnglish
Published 29.01.2008
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:An electromagnetic scanning micro-mirror is provided with a magnetic field generator for supplying a magnetic field, a mirror plate having a reflective plane and a frame structure attached to a rear surface of the reflective plane, a substrate to surround the mirror plate, a pair of torsion bars to connect the mirror plate to the substrate, and a magnetic substance provided at the rear surface of the reflective plane of the mirror plate and adapted to generate a drive force by interacting with the magnetic field supplied from the magnetic field generator, wherein the mirror plate performs a rotation operation about the torsion bars, which define the rotating axis of the mirror plate, by use of the drive force generated from the magnetic substance.
Bibliography:Application Number: US20060335093