Plate type capacitive sensor for five-dimensional displacement measurement

Disclosed herein is a plate type capacitive sensor for five-dimensional displacement measurement that is capable of simultaneously measuring five-dimensional movement of an object, which includes the horizontal movement, the vertical movement, and the tilt of the object. The plate type capacitive se...

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Bibliographic Details
Main Authors SHIM CHI-HYOUNG, HAN DONGUL, AHN HYEONG-JOON
Format Patent
LanguageEnglish
Published 04.12.2007
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING ELECTRIC VARIABLES
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:Disclosed herein is a plate type capacitive sensor for five-dimensional displacement measurement that is capable of simultaneously measuring five-dimensional movement of an object, which includes the horizontal movement, the vertical movement, and the tilt of the object. The plate type capacitive sensor for five-dimensional displacement measurement comprises a plate located adjacent to an object to be measured, and a ground part, a first guard part, a displacement measuring sensor, and a second guard part, which are stacked on the plate in consecutive order. The plate may be made by machining or made of a printed circuit board (PCB).
Bibliography:Application Number: US20060432145