System for controlling a volume of material on a mold
A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of f...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
16.10.2007
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes. |
---|---|
Bibliography: | Application Number: US20050101139 |