System for controlling a volume of material on a mold

A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of f...

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Bibliographic Details
Main Authors SHACKLETON STEVEN C, LAD PANKAJ B, TRUSKETT VAN N, MCMACKIN IAN M
Format Patent
LanguageEnglish
Published 16.10.2007
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Summary:A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.
Bibliography:Application Number: US20050101139