Aligned dummy metal fill and hole shapes

Aligning metal fill shapes with corresponding holes of a metal shield is provided. The holes of the metal shield are laid out corresponding to a pre-selected grid referenced to a pre-selected origin. The metal fill shapes of the metal fill pattern, are arranged in accordance with the same pre-select...

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Bibliographic Details
Main Authors SUCHARITAVES JEANNE-TANIA, LANDIS HOWARD S
Format Patent
LanguageEnglish
Published 31.07.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Aligning metal fill shapes with corresponding holes of a metal shield is provided. The holes of the metal shield are laid out corresponding to a pre-selected grid referenced to a pre-selected origin. The metal fill shapes of the metal fill pattern, are arranged in accordance with the same pre-selected grid and referenced to the same pre-selected origin. Accordingly, regardless of the size or spacing of the metal fill holes, a metal fill shape will substantially align with a corresponding metal fill hole. Such alignment between metallization levels and the structure of the metal shield and metal fill shape pattern enhance the electric noise blocking properties of the metal shield in conjunction with the metal fill shape.
Bibliography:Application Number: US20050908357