Optical targets
An optical target is provided. In one embodiment, the target is formed on a substrate. The target includes a first layer deposited below a second layer on the substrate. The second layer is deposited below a third layer on the substrate. The first layer has a topographic contour formed thereon, the...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
24.07.2007
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Subjects | |
Online Access | Get full text |
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Summary: | An optical target is provided. In one embodiment, the target is formed on a substrate. The target includes a first layer deposited below a second layer on the substrate. The second layer is deposited below a third layer on the substrate. The first layer has a topographic contour formed thereon, the first layer at least partially projecting a patterned topographical contour through the second layer to the third layer. |
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Bibliography: | Application Number: US20030697394 |