Method of manufacturing semiconductor device

• Main Author: INOUE SUSUMU
• Format: Patent
• Language: English
• Published: 24.01.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method of manufacturing a semiconductor device including a memory region in which non-volatile memory devices are arranged in a matrix form of a plurality of rows and a plurality of columns to form a memory cell array, the method including the steps of: forming a gate insulation layer, a conductive layer that will form a word gate, and a stopper layer above a semiconductor layer; forming a first insulation layer over the entire surface of the memory region; forming a first control gate in the form of a side wall on each of both side surfaces of the word gate, with the first insulation layer interposed with respect to the semiconductor layer; etching the surface of the first control gate; using that first control gate as a mask to remove part of the first insulation layer, thus forming a second insulation layer; forming a third conductive layer over the entire surface of the memory region; and forming a second control gate on the side surface of the first control gate, with the second insulation layer interposed with respect to the semiconductor layer, by anisotropic etching of the third conductive layer.